Abstract

Wafer fusion is an important processing tool for heterogenous integration of different materials regardless of their lattice constants. It removes the limitation of conventional epitaxial growth techniques and introduces a design parameter for achieving high performance semiconductor devices. In this article, we propose and demonstrate a 1.5 μm to 0.87 μm optical upconversion device based on wafer fusion technology. The device consists of an In0.53Ga0.47As (InGaAs) p-i-n photodetector and an AlGaAs/GaAs light-emitting diode (LED) integrated with wafer fusion. Incoming 1.5 μm light is absorbed by the InGaAs photodetector and generates a photocurrent. The resultant photocurrent drives the GaAs LED, which emits radiation at 0.87 μm. An internal quantum efficiency of 20% and an external quantum efficiency of 0.27% was obtained at room temperature. The results show the potential of the upconversion device in near-infrared imaging applications.

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