Abstract
This study proposes a new polishing method using MCF (magnetic compound fluid) slurry for ultra-precision and high-efficiency polishing of fused silica. A semi-fixed abrasive tool called "MCF wheel" was proposed that is in practice produced by putting MCF slurry on the outer surface of ring-shaped permanent magnets. In this paper, method of a certain number of water supplying to MCF wheel in the polishing process is proposed. In the result, prolongation of wheel life is realized because of inhibition of polishing temperature by maintaining of optimal construction of MCF wheel. In addition, ultra precision smooth surface is manufactured.
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