(001) CeO2 films epitaxially grown on SrTiO3 (001) substrates by pulsed laser deposition using a metallic Ce target

Abstract

Cerium dioxide (CeO2) films have been epitaxially grown on SrTiO3 (001) substrates by pulsed laser deposition using a metallic Ce target in oxygen ambient. In situ reflection high energy electron diffraction and X-ray diffraction confirm the formation of epitaxial (001) oriented CeO2 phase. Atomic force microscope and Raman spectra were used to characterize the surface morphologies and the bonding structures of the CeO2 films. Epitaxial growth of thick CeO2 films contributes chiefly to a uniform and smooth surface with root mean square roughness of up to 0.272 nm and a high-symmetry F2g mode.