Abstract
Floating potential fluctuations (FPF) of the direct current magnetron sputtering plasma as a function of discharge voltage were observed. The system behaves chaotic to quasi periodic transition as the discharge voltage is increased. Detailed quantify examination is carried out using time series analyzing techniques such as Lyapunov exponent and statistical estimation to explore the dynamics of the system. Visual information of FPF has been observed using recurrence plot (RP). Further, quantification and visual nationalization of the FPF is corroborated by 0-1 results.
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