0.02 °/h, 0.004°/√h, 6.3-mA NEMS Gyroscope With Integrated Circuit

Abstract

This work introduces a system formed by an integrated circuit and a micro-machined piezoresistive gyroscope, with navigation grade performance. After discussing the specifications in terms of maximum allowed electronic noise, so not to worsen the thermo-mechanical noise limits, three different front-end topologies are analysed, and the current-feedback instrumentation amplifier is chosen as the optimal solution in terms of noise and current consumption. After coupling to a gyroscope based on nano-gauges, the system demonstrates 200 <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">dps</i> full-scale, 0.02 °/h stability and 0.004 °/ √ h angle random walk, confirming navigation-grade performance at a current consumption well below 10 <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">mA</i> and an overall power consumption below 40 <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">mW</i> .