0.015 Degree-Per-Hour Honeycomb Disk Resonator Gyroscope

Abstract

High performance Microelectromechanical system (MEMS) gyroscopes are in great demand in the fields of precise navigation, automatic driving and precise attitude measurement. Honeycomb disk resonator gyroscope(HDRG) which works on wineglass-modes has many advantages including higher immunity to fabrication errors, better resonant mode consistency and better inner electrode arrangement, showing excellent potentials to be the next-generation MEMS gyroscope with high performance and good robustness. In this paper, a new HDRG prototype is designed based on the comprehensive optimizations of resonant structure and electrode configuration. The main structure parameters and the lumped-mass configuration are optimized systematically through the finite element simulation, while the configuration and arrangement of the inner electrodes are optimized based on the vibration amplification effect, offering systematic reference for the optimizations of other MEMS gyroscopes. The new HDRG is fabricated through a SOI fabrication technique and tested with a close-loop digital circuit. Quality factor of the optimized HDRG prototype reaches 650k, proving to be a record in silicon disk resonator gyroscopes. The bias instability of the optimized gyroscope reaches 0.015°/h under room temperature without any compensation, approaching the accuracy of navigation grade. Scale factor nonlinearity reached around 120ppm in the range of ±300°/s without compensation. The comprehensive performance is at the forefront of MEMS resonant gyroscopes.