Abstract
This paper describes the novel fabrication method of the high-aspect-ratio nano structure which is impossible by conventional method using a shadow mask and a Deep X-ray Lithography (DXRL). The shadow mask with 1㎛-sized apertures is fabricated on the silicon membrane using a conventional UV-lithography. The size of aperture is reduced to 200㎚ by accumulated low stress silicon nitride using a LPCVD (low pressure chemical vapor deposition) process. The X-ray mask is fabricated by depositing absorber layer (Au, 3㎛) on the back side of nano shadow mask. The thickness of an absorber layer must deposit dozens micrometers to obtain contrast more than 100 for a conventional DXRL process. The thickness of 3㎛-absorber layer can get sufficient contrast using a central beam stop method, blocking high energy X-rays. The nano circle and nano line, 200㎚ in diameter in width, respectively, were demonstrated 700㎚ in height with a negative photoresist of SU-8.
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