유동층 화학기상증착법으로 제조된 TRISO 피복입자의 ZrC 층 미세구조와 경도에 미치는 증착온도의 영향

Abstract

Tristructural-isotropic (TRISO)-coated particles were fabricated by a fluidized-bed chemical vapor deposition (FBCVD) method for use in a very high temperature gas-cooled reactor (VHTR). ZrC as a constituent layer of TRISO coating layers was deposited by a chloride process using ZrCl₄ and CH₄ source gases in a temperature range of 1400℃ and 1550℃. The change in the microstructure of ZrC depending on the deposition temperature and its effect on the hardness were evaluated. As the deposition temperature increased to 1500℃, the grain size of the ZrC increased and the hardness of the ZrC decreased according to the Hall-Petch relationship. However, at 1550℃, the ZrC layer was highly non-stoichiometric and carbon-rich and did not obey the Hall-Petch relationship in spite of the decrease of the grain size. A considerable amount of pyrolytic carbon at the grain boundaries of the ZrC as well as coarse granular pyrolytic carbon were locally distributed in the ZrC layer deposited at 1550℃. Therefore, the hardness decreased largely due to the formation of a large amount of pyrolytic carbon in the ZrC layer.