엠보싱 TiO2박막에서 링크 형상 제어에 따른 가스 감도 변화

Abstract

Embossed <TEX>$TiO_2$</TEX> thin films with high surface areas are achieved using soft-templates composed of monolayer polystyrene beads. The form of links between the beads in the templates is controlled by varying the <TEX>$O_2$</TEX> plasma etching time on the templates, resulting in various templates with close-linked, nano-linked, and isolated beads. Room-temperature deposition of <TEX>$TiO_2$</TEX> on the plasma-treated templates and calcination at <TEX>$550^{\circ}C$</TEX> result in embossed films with tailored links between anatase <TEX>$TiO_2$</TEX> hollow hemispheres. Although all the embossed films have similar surface areas, the sensitivity of films with nano-linked <TEX>$TiO_2$</TEX> hollow hemispheres to 500 ppm CO and ethanol gases are much higher than that of films with close-linked and isolated hollow hemispheres, and the detection limits of them are as low as 0.6 ppm for CO and 0.1 ppm for ethanol. The strong correlation of sensitivity with the form of links between hollow hemispheres reveals the critical role of potential barriers formed at the links. The facile, large-scale, and on-chip fabrication of embossed <TEX>$TiO_2$</TEX> films with nano-linked hollow hemispheres on Si substrate and the high sensitivity without the aid of additives give us a sustainable competitive advantage over various methods for the fabrication of highly sensitive <TEX>$TiO_2$</TEX>-based sensors.