Abstract
A chromel-alumel thermoelectric flow sensor using thermal isolation membrane was fabricated. Temperature coefficient of resistance of thin film Pt-heater was about , and Seebeck coefficient of chromel-alumel thermocouple was about . The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and -flow sensitivity increased as heater voltage increased or the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, -flow sensitivity and thermal response time of the sensor were about and 0.18 sec., respectively. Linear range in flow sensitivity of the flow sensor was wider than that of Bi-Sb flow sensor.
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