Abstract

We observed a reconstructed Si(110) surface using an ultrahigh-vacuum (UHV) non-contact atomic force microscope (NC-AFM). The Si(110) surface has several characteristic structures, such as the 16×2, (17, 15, 1) 2×1, 1×1, zigzag structures. We demonstrated the AFM observation of the surface formed upon annealing the samples in direct current heating so as to clean the surface. We obtained the same structures in the AFM observation as the proposed 16×2 model of a Si(110) reconstruction in a STM observation. The UHV NC-AFM results substantiated that the Si(110) surface has a characteristic 16×2 structure.

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