Abstract
The X-ray method is known as the most powerful method to measure the subsurface distribution of residual stresses. To obtain the precise stress distribution, the constant penetration depth (PCD) method by proposed Akiniwa et al was extended to be applicable for non-equi-biaxial state of stresses. The PCD method is only applicable to polycrystals without strong texture. For the thin films with fiber texture, the scattering vector constant (SVC) method was proposed. The CPD method was applied to measure the residuals tress distribution of silicon nitride bombarded with steel fine particles, and the SVC method was applied to TiN thin films carted on steel substrate by the ion beam mixing method.
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