유연한 디스플레이 소자의 보호막용 직접 패턴 형성이 가능한 POSS계 저유전 물질의 제조

Abstract

The passivation layer, which is located between a pixel electrode and a data elec- trode, must provide sufficiently low parasitic capacitance and sufficient electrical insulation to reduce cross talk and signal distortion. The present demand for passivation materials for next-generation displays has created interest in substitutes with low dielectric constant, high transmittance, thermal stability, and patternability; these requirements cannot be met by the silicon nitride layer and silicon dioxide used currently. To meet these requirements, negative-tone patterning systems containing polyhedral oligomeric silsesquioxane (POSS) were developed by adopting two different approaches: use of POSS in the polymeric matrix and in the crosslinker. The polymeric matrix, poly(methacryl isobutyl POSS-r- hydroxy styrene), showed improved dielectric property and thermal stability. However, the POSS content was limited owing to poor solubility. A POSS crosslinker with epoxy func- tional groups was used along with phenol group containing polymeric matrices; poly(4- hydroxy styrene). It was possible to pattern the POSS crosslinker system by irradiating it with UV light and subjecting it to subsequent thermal treatment. With increasing POSS content, the crosslinked materials showed increased transparency, higher thermal stability, and lower dielectric constant. The system could also be patterned by irradiating it with UV through a patterned mask.