펄스 레이저 증착(PLD)법에 의한 ZnO 박막 성장과 열처리 효과

Abstract

ZnO epilayer were synthesized by the pulsed laser deposition(PLD) process on <TEX>$Al_2$</TEX> <TEX>$O_3$</TEX>substrate after irradiating the surface of the ZnO sintered pellet by the ArF(193 nm) excimer laser. The epilayers of ZnO were achieved on sapphire(A <TEX>$l_2$</TEX> <TEX>$O_3$</TEX>) substrate at a temperature of 400 <TEX>$^{\circ}C$</TEX>. The crystalline structure of epilayer was investigated by the photoluminescence and double crystal X-ray diffraction(DCXD). The carrier density and mobility of ZnO epilayer measured with Hall effect by van der Pauw method are 8.27<TEX>${\times}$</TEX><TEX>$10^{16}$</TEX><TEX>$cm^{-3}$</TEX> and 299 <TEX>$\textrm{cm}^2$</TEX>/Vㆍs at 293 K, respectively. The temperature dependence of the energy band gap of the ZnO obtained from the absorption spectra was well described by the Varshni's relation, <TEX>$E_{g}$</TEX>(T)= 3.3973 eV - (2.69 <TEX>${\times}$</TEX> 10<TEX>$_{-4}$</TEX> eV/K) <TEX>$T^2$</TEX>(T＋463k). After the as-grown ZnO epilayer was annealed in Zn atmospheres, oxygen and vaccum the origin of point defects of ZnO atmospheres has been investigated by the photoluminescence(PL) at 10 K. The native defects of <TEX>$V_{Zn}$</TEX> , <TEX>$V_{o}$</TEX> , Z <TEX>$n_{int}$</TEX>, and <TEX>$O_{int}$</TEX> obtained by PL measurements were classified as a donors or accepters type. In addition, we concluded that the heat-treatment in the oxygen atmosphere converted ZnO thin films to an optical p-type. Also, we confirmed that vacuum in ZnO/A <TEX>$l_2$</TEX> <TEX>$O_3$</TEX>did not form the native defects because vacuum in ZnO thin films existed in the form of stable bonds.s.s.s.