Abstract
To satisfy the requirement of assembling a capsule and a fill tube for the cryogenic targets in ICF experiments for the 3 pL adhesive volume,the time/pressure micro-bonding technology was studied.A microinjector for life science research was changed to a time/pressure pL micro-bonding device,and a capillary needle made of quartz with inside diameter of 0.5 μm was used for dispersing.A micro-bonding station was built for experiments.Two microscopes interfaced with CCD and resolution of 1.57 μm were designed to detect the position of the capillary tip and the size of the glue drop,and a XYZ motion stage was employed to control the position of the capillary tip.The hardware composition,control system,dispensing process of the micro bonding station was introduced,and the dispensing control,adhesive volume detection,and glue drop positioning experiments were performed to research the key dispensing processes,such as the main factors that affects the volume control and the minimum volume that can be controlled.Experimental results indicate that the designed station can control the minimum adhesive drop in 2 pL using UV Epoxy adhesive with viscosity of 5P in the normal temperature environment,which satisfies pL dispensing requirements in the micro assemblies.
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