적응 PID를 이용한 질량 유량 제어기 구현

Abstract

The MFC(Mass Flow Controller) is an equipment that measures and controls mass flow rates of fluid. Most of the HFC system is still using the PID algorithm. The PID algorithm shows superior performance on the MFC system. But the PID algorithm in the MFC system has a few problems as followed. The characteristic of the MFC system is changed according to the operating environment. And, when the piezo valve that uses the control valve is assembled in the MFC system, a coupling error is generated. Therefore, it is very difficult to find out the exact parameters of MFC system. In this paper, we propose adaptive PID algorithm in order to compensate these problems of a traditional PID algorithm. The adaptive PID algorithm estimates the parameters of MFC system using LMS(Least Mean Square) algorithm and calculates the coefficients of PID controller. Besides, adaptive PID algorithm shows better transient response because adaptive PID algorithm includes a feedforward. And we implement MFC system using proposed adaptive PID algorithm with self-tuning and Ziegler and Nickels's method. Finally, comparative analysis of the proposed adaptive PID and the traditional PID is shown.