Abstract
Measurement of the out-of-plane displacement of a cantilever is performed by phase-shifting digital holographic interferomety. Phase-shifting method is used for the phase analysis of the hologram recorded on a CCD sensor. The complex amplitude of the reconstructed object is obtained from the complex amplitude of the CCD plane using the Fresnel diffraction algorithm. The difference of the phase distributions before and after deformation, i.e. out-of-plane displacement is calculated. In order to decrease the effect of speckle pattern, the hologram is divided into 16 parts. The phase is obtained from the phase with the maximum amplitude among the complex amplitudes obtained from all the separated holograms. As the result, by eliminating the effect of speckle, a smooth phase difference distribution is obtained.
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