Abstract
Evaluation of the mechanical properties of microelements is difficult because of the small size of the specimens. In this paper, a tensile testing machine and a bending testing machine for a microelement were developed. Tension-tension fatigue tests for polysilicon specimens have been carried out in various environments, but no specimen fractured within 107 stress cycles. Bending tests have been conducted by the system based upon a Nano Indenter with knife-edge type indenter and a piezo stage. Fracture stress obtained by the bending test was 3.9±0.5GPa, which was higher than the strength under tensile loading.
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