Abstract
Nano structure <TEX>$Bi_2Te_3$</TEX> films were deposited on (100) GaAs substrates using a modified MOCVD system and the effect of growth parameters on the structural properties were investigated. Different from conventional MOCVD systems, our reactor consist of pressure control unit and two heating zones ; one for formation of nano-sized particles and the other for the growth of nano particles on substrates. By using this instrument we successfully grow <TEX>$Bi_2Te_3$</TEX> films with nano-grain size. The film grown at high reactor pressure has large grain size. On the contrast, the grain size decreases with a decrease in pressure of the reactor. Here, we introduce new growth methods of nano-grain structured <TEX>$Bi_2Te_3$</TEX> films for high thermoelectric figure of merit.
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