Abstract
HSMS communication system using low-cost micro controller units(MCUs) is an essential technique for online semiconductor equipment system developments. It is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed and the facilitated hardware setup is convenient. In this paper, an HSMS communication system using low-cost MCUS is designed and implemented. Using a MCU with a low price but high-performance as a main board, a module which processes HSMS communication is designed, and a circuit is designed to process BCR independently with a microminiature MCU. To convert tag data which is recognized from BCR into data based on HSMS communication protocol, SECS-II message is designed. Lastly, an HSMS communication system is implemented based on these designs. A low-cost HSMS communication module developed in this study can be applied in realtime monitoring and controlling system for semiconductor processes.
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