Abstract
Smooth and flat surface of glass plates should be needed for the HDD substrate. Polishing with free abrasives made smooth surface, however it is difficult to obtain flat surface because of the nonuniform distribution of free abrasives. In order to overcome such issue, we tried to apply magnetic force with magnetic fluid and magnetic field for uniform distribution of abrasives during polishing process. By applying 20mT of normal magnetic filed to the copper polishing plate with magnetic fluid as polishing liquid, surface roughness of polished glass plate improved by 20-60%. And flatness of polished glass decreased to half with magnetic fluid and magnetic filed.
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