Abstract
Results of experimental and numerical studies of an electric-discharge KrF laser with a specific pump power of 3.5 and 7 MW/cm3 are presented; in this case, lasing was obtained with a specific radiation pulse energy of ~ 6 and 9.5 J/l, with an internal energy efficiency of ~ 4%. Time dependences of the formation of charged and excited particles in a dense excimer plasma with an electron concentration of ne ~ 1016 cm-3 are shown. Conditions for the effective operation of the laser are proposed, which will make it possible to ensure a further increase in the specific radiation energy by more than two times while maintaining the high internal efficiency of the laser relative to the energy deposited into the discharge.
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