Abstract

다결정 <TEX>$Ge_{1-x}Mn_x$</TEX> 박막의 자기적 상들에 관한 연구가 이루어졌다. Molecular beam epitaxy(MBE) 장비를 이용해 <TEX>$400^{\circ}C$</TEX> 에서 <TEX>$Ge_{1-x}Mn_x$</TEX> 박막을 성장시켰다. <TEX>$Ge_{1-x}Mn_x$</TEX> 박막의 캐리어 유형은 P타입 이였고, 전기 비저항 값은 <TEX>$4.0{\times}10^{-2}{\sim}1.5{\times}10^{-4}ohm-cm$</TEX>이었다. 자기적인 특성과 미세구조의 분석에 기초하여 <TEX>$Ge_{1-x}Mn_x/SiO_2$</TEX>/Si(100) 박막에 310 K 이내의 큐리에온도를 지닌 강자성의 <TEX>$Ge_3Mn_5$</TEX> 상이 형성되었음을 알 수 있었다. 게다가, <TEX>$Ge_3Mn_5$</TEX> 상이 형성된 <TEX>$Ge_{1-x}Mn_x$</TEX> 박막은 20 K, 9 T의 자기장에서 약 9%의 음의 자기저항을 보였다. Magnetic phases of polycrystalline <TEX>$Ge_{1-x}Mn_x$</TEX> thin films were studied. The <TEX>$Ge_{1-x}Mn_x$</TEX> thin films were grown at <TEX>$400^{\circ}C$</TEX> by using a molecular beam epitaxy. The <TEX>$Ge_{1-x}Mn_x$</TEX>thin films were p-type and electrical resistivities were <TEX>$4.0{\times}10^{-2}{\sim}1.5{\times}10^{-4}ohm-cm$</TEX>. Based on the analysis of magnetic characteristics and microstructures, it was concluded that the ferromagnetic phase formed on the <TEX>$Ge_{1-x}Mn_x/SiO_2$</TEX>/Si(100) thin films was <TEX>$Ge_3Mn_5$</TEX> phase which has about 310 K of Curie temperature. Moreover, the <TEX>$Ge_{1-x}Mn_x$</TEX> thin film which had <TEX>$Ge_3Mn_5$</TEX> phase showed the negative magnetoresistance to be about 9% at 20 K when the magnetic field of 9 T was applied.

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