Abstract
Magnetostriction and its susceptibility of Fe3.2Tb alloy thin film deposited on polyurethane rubber substrate with low deformation resistance by using direct current magnetron sputtering process were investigated. When both residual gas pressure before argon sputtering and sputtering pressure of argon gas (5 N) were less than 5.0×10-4 Pa and 2.0×10-1 Pa, respectively, the thickness of the Fe3.2Tb films deposited was about 2.96 μm. The giant magnetostriction was found in the Fe3.2Tb alloy film on polyurethane rubber sheet, rather than on other polymer sheets. Giant motion strain of Fe3.2Tb alloy film largely depended on deformation resistance of substrate.
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