Abstract

Vertical wet equipment for the BGA develop process was newly developed substituted for conventional horizontal wet equipment. The benefits of vertical equipment are that the pattern damages generated by the collision between the patterns and transferring rollers can be eliminated because the direct contact between the equipment`s transferring units and the soft dry film patterns does not occurs. Taguchi experiment was conducted to optimize the process characteristics for the vertical equipment. The experiment was organized as the smaller the better problem which includes adequate uncontrollable factor and controllable factors. The uncontrollable factors are the 4 sides of two panels which are loaded to the equipment at the same time. By the analysis of the experiment, temperature of the develop chemicals and develop spraying time are analyzed as the main controllable factors. Finally, line pattern`s minimum width which is not damaged for the develop process was improved from for the horizontal equipment to for the vertical equipment. And dot pattern`s minimum width is improved from to .

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