Abstract
This paper describes the fabrication and characteristics of micro heaters built on AlN(<TEX>$0.1{\mu}m$</TEX>)/3C-SiC(<TEX>$1{\mu}m$</TEX>) suspended membranes by surface micromachining technology. In this work, 3C-SiC and AlN films are used for high temperature environments. Pt thin film was used as micro heaters and temperature sensor materials. The resistance of temperature sensor and the power consumption of micro heaters were measured and calculated. The heater is designed for operating temperature up to about <TEX>$800^{\circ}C$</TEX> and can be operated at about <TEX>$500^{\circ}C$</TEX> with a power of 312 mW. The thermal coefficient of the resistance(TCR) of fabricated Pt resistance of temperature detector(RTD)'s is 3174.64 ppm/<TEX>$^{\circ}C$</TEX>. A thermal distribution measured by IR thermovision is uniform on the membrane surface.
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