Abstract
This research deals with a monitoring method for lapping process. In the preceding paper, it had been shown that the surface roughness of the work can be monitored in process by detecting the acoustic signals transmitted in the lapping jig. To detect the signals efficiently with a piezoelectric ceramic sensor equipped on the jig and to evaluate the lapping condition properly, it is necessary for the jig to have simple characteristics of vibration. In this paper, a conical-horn type of lapping jig was newly designed to have simple structure, wide frequency range, high acoustic gain and high reproducibility. The experimental investigation in the frequency range less than 10kHz showed the acoustic power level of approximately 2kHz could be used for the process monitoring. It was also confirmed that there was a linear relation between the acoustic power level and the surface roughness of the work.
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