공진 주파수 등방성 향상을 위한 2-자유도 직렬 위치 결정 스테이지의 연성 해석과 설계 최적화

Abstract

Precision positioning stages are devices for precisely positioning objects according to required degrees of freedom and performance. Precision positioning stages are classified into serial and parallel mechanisms. Except for specific applications, the parallel mechanism is preferred. In serial mechanism, dynamic characteristics such as resonant frequency are clearly different from axis to axis and the first resonance frequency is distinctly low compared to the second. These make the control performance different for each axis and incurs limitation in control. In this study, the first and second resonant frequencies in a serial 2-DOF precision positioning stage were increased while maintaining their approximal value. Compliance analysis for the stage was performed by applying the matrix based method. A new concept of resonant frequency isotropy (RFI) was introduced and design optimization was performed in which first and second resonant frequencies almost coincided. This optimization allowed for the design of a serial 2-DOF precision positioning stage with enhanced first resonance frequency by 50.8% and RFI by 80.2% compared to the initial design. This paper is expected to increase the use of precision positioning stages based on serial mechanism and apply the concept of RFI to the positioning stages with more than 2-DOF.