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Abstract
One dimensional table unit driven by a sliding screw or a ball screw is made with a laserfeed-back system, aiming at ultra-precision positioning at high speed. In this report, the follow-ing items are clarified by the experiment of PTP proportionalcontrol : (1) With increasing theaxial speed, the sliding screw requires much more energy than the ball screw and this derivesa damping effect to the control system. Therefore, the ball screw shows a sharper response thanthe sliding screw. (2) In case of the simple proportional control, the deviation error (off-seterror) is generated by the quantumization of a D/A converter. By adjusting the proportionalgain, both the deviation error and the dispersion error cannot be decreased at the same time.
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