Abstract

Influences of composition on magenetostriction of Sm-Fe alloy thin films prepared by D.C. magnetron sputtering process were investigated. Composition of formed film was ranged form 25 to 59 at%Sm. Negative magnetostriction were obtained of amorphous Sm-Fe thin films. The magenetostriction of thin films was varied with composition rate of Sm-Fe alloy. The giant magnetostriction over 1000 ppm at 400 kA/m was observed from 29 to 34 at% for Sm-Fe alloy film. The giant magnetostrictive (Sm-Fe) alloy thin film showed its potential use as wireless actuators in microsystem technology.

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