Abstract
This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring the phase shift of output signal. A delay-line with a center frequency of 400 MHz was fabricated on <TEX>$128^{\circ}$</TEX> Y-Z <TEX>$LiNbO_{3}$</TEX> substrates. Experimental results, which showed the phase change of the output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films were greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.
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