Abstract
In order to clarify the mechanical criterion of compound formation reaction of Ti/Si multilayered-nano-films, we conducted compressive experiments for micro-pillar specimens fabricated from the Ti/Si multilayer by focused ion beam (FIB). Compressive displacement in the stacking direction was applied to the specimen by a diamond spherical tip using a nano-indenter under in situ field emission scanning electron microscopy (FESEM) observation. In the experiments, some spherical particles appeared at the tip contact region and grew larger with increasing displacement. This suggested that compound formation reaction occurred and compound were formed. In addition, FESEM observation of FIBed cross-sections after the compression tests revealed that the Ti/Si multilayers disappeared at the high stress region. These results suggested the presence of a mechanical criterion of the compound formation reaction.
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