Abstract
We present the design, fabrication, and characterization of a multi-chip microelectrofluidic bench, achieving both electrical and fluidic interconnections with a simple, low-loss and low-temperature electrofluidic interconnection method. We design 4-chip microelectrofluidic bench, having three electrical pads and two fluidic I/O ports. Each device chip, having three electrical interconnections and a pair of two fluidic I/O interconnections, can be assembled to the microelectofluidic bench with electrical and fluidic interconnections. In the fluidic and electrical characterization, we measure the average pressure drop of 13.6~125.4 Pa/mm with the nonlinearity of 3.1% for the flow-rates of 10~100 μl/min in the fluidic line. The pressure drop per fluidic interconnection is measured as 0.19kPa. Experimentally, there are no significant differences in pressure drops between straight channels and elbow channels. The measured average electrical resistance is 0.26Ω/mm in the electrical line. The electrical resistance per each electrical interconnection is measured as 0.64Ω. Mechanically, the maximum pressure, where the microelectrofluidic bench endures, reaches up to 115?11kPa.
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