低フラックス原子状酸素ビームとポリイミド薄膜との表面反応 １ 反応率の運動エネルギー依存性

Abstract

Translational energy dependence of the atomic oxygen reactivity with polyimide films is reported. An ion beam type atomic oxygen source was used to study atomic oxygen reactivity in a wide range of translational energies. Mass change of polyimide films was measured by a frequency shift of the quartz crystal microbalance during atomic oxygen beam exposures. The experimental result showed strong translational energy dependence of mass change of the polyimide film, i.e., mass gain was observed at the translational energies below 30eV whereas mass loss was observed at the higher translational energies. X-ray photoelectron spectra indicated that pyromelliticdianhydride in the polyimide structure was degradated by the 5eV atomic oxygen reaction. Decomposition of oxydianiline was also obvious at higher translational energies. The mass gain observed in this study was explained by the absence of adsorbed oxygen at the polyimide surfaces due primarily to the low flux of the beam, which may lead to the suppression of debonding of polymer backbones.