Abstract
The principle of electron energy loss spectroscopy (EELS) is discussed based on the dielectric function of solid specimen. Electron energy loss spectra in low (<50eV) and high energy loss regions (>50eV) are analysed for graphite and explained by its electronic band structure. Limitations of the spatial resolution and the detectable mass concentration by EELS in TEM are discussed from the point of view of local chemical analysis. The mapping techniques and images formed by characteristic energy losses of each element contained within the specimen are shown for some examples. In addition to EELS in TEM, other examples of EELS in SEM are shown for surface analysis of bulk specimen.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
