Abstract
최근까지 유기박막의 제조에 있어서 진공 증착 혹은 스핀코팅법의 대체방법으로 펄스 레이져 증착법 (PLD: Pulsed laser deposition)에 많은 관심이 되고 있는 실정이다. 본 논문에서는 유기발광소자(OLED)의 제작을 위해 <TEX>$Alq_3$</TEX>(aluminato-tris-8-hydroxyquinolate)와 TPD의 유기물을 질소(<TEX>$N_2$</TEX>)분위기 상태에서 KrF(<TEX>$\lambda$</TEX>=278 nm) 엑시머 레이저를 이용한 PLD법으로 증착하였고, 증착공정변화에 따른 증착된 박막의 분자 및 광학적 특성의 효과를 PL과 FT-IR등을 이용하여 평가하였다. In recent years, there has been highly interestedin pulsed laser deposition (PLD) method for fabrication of the organic thin films, as an alternative to conventional fabrication method such as vacuum evaporation and spin coating techniques. In this study, organic thin films of <TEX>$Alq_3$</TEX> (aluminato-tris-8-hydroxyquinolate) and TPD for organic light emitting diodes (OLED) were deposited by PLD using KrF excimer (<TEX>$\lambda$</TEX>=278 nm) laser in nitrogen atmosphere. Deposited films were evaluated by photoluminescence(PL), Fourier-transform Infrared Spectroscopy (FT-IR) to study the effect of the laser and <TEX>$N_2$</TEX> atmosphere parameters on the structural and optical properties.
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