Abstract
Abstract Here, we review the various methods for the preparation of vanadium dioxide (VO 2 ) films and nanowires, and their potential appli-cations to the sensors such as gas sensor, strain sensor, and temperature sensor. VO 2 is an interesting material on account of its easilyaccessible and sharp Mott metal-insulator transition (MIT) at ~68°C in the bulk. The MIT is also triggered by the electric field, stress,magnetic field etc. This paper involves exceptionally sensitive hydrogen sensors based on the catalytic process between hydrogen mol-ecules and Pd nanoparticles on the VO 2 surface, and fast responsive sensors based on the self-heating effects which leads to the phasechanges of the VO 2 . These features will be seen in this paper and can enable strategies for the integration of a VO 2 material in advancedand complex functional units such as logic gates, memory, FETs for micro/nano-systems as well as the sensors.Keywords: Sensors, Oxide semiconductors, VO 2 , Metal-insulator transition, Films, Nanowires
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