Abstract
ウルトラクリーンプロセスと微細構造制御 薄膜媒体並びに薄膜ヘッド材料を例として
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https://doi.org/10.2320/materia.37.865
Journal: Materia Japan | Publication Date: Jan 1, 1998 |
License type: mit |
ウルトラクリーンプロセスと微細構造制御 薄膜媒体並びに薄膜ヘッド材料を例として
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