화학적 에칭을 이용한 유체 및 공기 동압 베어링용 그르브 가공

Abstract

Abstract - This paper presents a chemical etching system for groove manufacturing for the fluid and aero dynamic bearings. To manufacture the grooves to thrust and journal surface of the fluid and aero dynamic bearing, it is very important for grooves' depth to be smaller tolerance. It is very difficult for the internal surface of journal bearing to make the grooves precise. If the precision of the groove is not exact, we can not get the desirable performance for the target of the dynamic bearing. To make the groove of bearing precise, we propose the method of chemical etching system. It has known that the method of chemical etching can not make the groove on the internal surface of journal bearing excepts for on the surface of thrust bearing. However, this paper has shown the solution to make the grooves on it. We obtain the condition and the parameters of the system such as time, chemical material composition and so on. In this paper, we get the experimental results to verify the precise groove manufacturing for the fluid and aero dynamic bearing.Key Words : Chemical etching, Fluid dynamic bearing, Aero dynamic bearing, Groove, Thrust surface, Journal surface†교신저자, 정회원 : 인하공업전문대학 전기정보과 교수E-mail : leeyong@inhatc.ac.kr*정 회 원 : 인하공업전문대학 전기정보과 교수 접수일자 : 2012년 11월 1일 최종완료 : 2012년 11월 25일