Abstract
The sensitivity coefficient of a commercial Bayard-Alpert gauge depends on the diameter of its ion collector electrode. The nominal value of the coefficient for the gauge of 125 μm in diameter is 1.25 times higher than that for the gauge of 50 μm, while the amount of ions generated inside the anode is almost the same by our calculation. Ion trajectory inside the anode was also calculated using a grid type anode. Ions were collected into the ion collector for the most parts, but some parts passed through the space between the grids. The products of the ion density generated inside the anode and the collection efficiency into the ion collector differed from 1.1 to 1.3 times depending on the diameter. Therefore, the difference in the coefficient by the diameter was explained by the ion collection efficiency.
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