Abstract
Carbon nanotube (CNT) mats grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm were investigated as sensing materials of resistive gas sensors for nitrogen dioxide (<TEX>$NO_{2}$</TEX>) gas. The aligned CNT mats fabricated into mesh and serpentine shapes by the patterned cobalt catalyst layer. CNT mats showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to <TEX>$NO_{2}$</TEX>. All sensors exhibited a reversible response at a thermal treatment temperature of <TEX>$130^{\circ}C$</TEX> for about 5 minutes. The resistance change to <TEX>$NO_{2}$</TEX> of the mesh-shaped CNT mats was larger than that of the serpentine-shaped CNT mats.
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