Условия закипания капель на поверхности тонкой плёнки оксида цинка при импульсном лазерном осаждении

Abstract

The pulsed laser deposition (PLD) method is widely used in the production of different thin films. PLD has several advantages: flexible adjustment of parameters and controllability of processes and ease of synthesis of materials. The deposition of zinc oxide droplets during the synthesis of zinc oxide thin films by PLD is considered and the temperature and initial speed of droplets, which can boil on the thin film surface, are determined. The study of the process of the deposition of droplets from a ZnO target was carried out during the growth of thin films according to the traditional scheme for the PLD method. The process of the deposition of ZnO droplets during the PLD of ZnO films under vacuum conditions is considered. For the first time, it has been revealed that ZnO drops are boiling on the thin ZnO film surface. For the first time, the temperature and speed of solid and liquid drops of ZnO, at which they can boil when they hit the substrate, have been calculated taking into account the processes of heat loss through radiation and the heat of phase transition. Thus, for the first time, it has been established experimentally and confirmed in calculations that at the moment of collision some drops of ZnO are boiling. The role of the heat of phase transition and heat loss due to radiation during the flight of droplets during the PLD of ZnO thin films in a vacuum has been clarified. The temperature of a ZnO drop after a collision with a substrate was calculated in a wide range of initial speed and temperature taking into account heat losses due to radiation and heating from impact.