Abstract
炭化チタン陰極を用いた真空アークイオン源によるチタン+炭素の同時イオン注入
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https://doi.org/10.3131/jvsj.36.100
Journal: SHINKU | Publication Date: Jan 1, 1993 |
License type: free |
炭化チタン陰極を用いた真空アークイオン源によるチタン+炭素の同時イオン注入
Join us for a 30 min session where you can share your feedback and ask us any queries you have