Abstract
The pressure dependence of the electron stimulated desorption (ESD) ions were investigated by the quadrupole mass spectrometer with a Bessel-box type energy analyzer. The mass spectra of the ESD ions were measured under introduction of H2O, CO, O2 and CO2. The ESD ion peaks for those gasses were observed at O+ (m/z=16). The mass spectra of the gas phase ions were also measured and compared with those of ESD ions during the pumping down process. The origin of the main species in ESD ions, O+, was the adsorbed H2O on the grid surfaces.
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