Abstract
The several characteristics of TiNi thin films treated by the new method, direct Joule's heat crystallization treatment method, were compared with those treated by conventional heat treatment method in an electrical furnace. As the results, the followings were clarified for reversible TiNi thin films : (1) the crystal compositions of the TiNi thin films treated by the new method were same as those by the conventional method, (2) moreover, the TiNi thin films treated by the new method were deformed larger than those by the conventional method, and (3) the optimum heat treatment condition for producing larger deformable TiNi thin film is found as 600°C×1 minute. From these results, the new crystallization heat treatment method is very useful for TiNi thin film actuators.
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