Abstract
Experimential observation of SiO2 precipitation reaction on a Si substrate through thermal decomposition of TEOS was pursued as functions of temperature, TEOS concentration and residence time where the gaseous reaction products identified by the atmospheric mass-spectrometer are C2H5 and C2H5OH, from which the following reaction scheme can be proposed:(1) The overall thermal decomposition reaction of TEOS to precipitate SiO2(s) can be expressed as follows:(This article is not displayable. Please see full text pdf.) (2) The gaseous reaction intermediate species observed is SiO(OC2H5)2, which may be produced by the following reaction:(This article is not displayable. Please see full text pdf.) (3) The oder of reaction with respect to the TEOS concentration obtained experimentally is from 0.2 to 0.5.(4) The above-mentioned experimental observation, in which the step(c) is the rate controlling step and the oder of reaction is (1/3), leads to(a) the thermal decomposition of TEOS to produce the intermediate:(This article is not displayable. Please see full text pdf.) (b) the adsorption reaction of the intermediate:(This article is not displayable. Please see full text pdf.) (c) the SiO2(s) precipitation from the adsorpted speciees:(This article is not displayable. Please see full text pdf.)
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