Abstract
We investigated electroless aluminum plating using AlCl3-1-ethyl-3-methylimidazolium chloride (AlCl3-EMIC) ionic liquid containing diisobutyl aluminum hydride (DIBAH) and BiCl3. The plating film was analyzed using X-ray diffraction and scanning electron microscopy. The aluminum films prepared with BiCl3 were smoother than those prepared without BiCl3. Furthermore, the plating bath stability was improved by addition of BiCl3.
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