フィールド・イオン顕微鏡によるタングステンの表面自己拡散の研究

Abstract

The diffusion behavior of the terrace-adatoms on the (431) and (321) planes and the ledge-adatoms on the (211) and (321) planes of tungsten in the temperature range between 270 and 350 K has been studied using a field-ion microscope and a newly developed theoretical treatment of the probability density of adatom displacement. It has been found that edge of the terrace acts as a trapping boundary for the diffusing terrace-adatoms on the (431) and (321) planes below about 300 K. Diffusion of the ledge-adatoms on the (211) and (321) planes resembles that of the terrace-adatom on the (321) plane.