Abstract
The paper presents the results of experiments in the fabrication and research of properties of photodetector structures on the basis of monolayer graphene produced by chemical vapor deposition. The base structure was the geometry of a Ta2O5 vertical microcavity with a lower dielectric SiO2/Ta2O5 distributed Bragg reflector with a resonance wavelength of about 850 nm. The conditions were optimized for the transfer and fabrication of mesas in the graphene layer on the microcavity surface. The diagnostics of the structural quality of graphene after the fabrication of mesas in the graphene layer and contact pads by Raman spectroscopy evidence the monolayer structure of graphene with a low singularity strength in its spectrum that is responsible for the structure imperfection. The photocurrent value at local optical pumping was measured.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.