Abstract
The soft X-ray beamline constructed for an industry application is briefly introduced. The varied line spacing plane grating monochromator (VLS-PGM) has been designed in order to cover the wide-energy range from 40-1000 eV with a set of three focusing mirrors and one grating. The resolving power is expected to be more than 5000 with 10 micron slits. The conventional photoelectron spectrometer is installed with an ion gun, a flood gun and a twinanode X-ray source. The instrument for XAFS measurement is also attached to the main chamber.
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